引用本文: 庞建伟, 闫鹏. 基于压电薄膜驱动的微定位平台建模与分析[J]. 机器人, 2017, 39(5): 595-602.
PANG Jianwei, YAN Peng. Modeling and Analysis of a Piezoelectric-film Driven Micro-positioning Stage[J]. ROBOT, 2017, 39(5): 595-602.
 Citation: PANG Jianwei, YAN Peng. Modeling and Analysis of a Piezoelectric-film Driven Micro-positioning Stage[J]. ROBOT, 2017, 39(5): 595-602.

Modeling and Analysis of a Piezoelectric-film Driven Micro-positioning Stage

• 摘要: 设计了一种基于压电薄膜驱动梁和柔性铰链结构的3维微定位平台，并且为了准确评估平台性能提出了一种理论建模分析方法．首先，根据力平衡条件下的欧拉-伯努利梁理论和压电本构方程，得到压电薄膜梁的输出模型；然后，根据柔度矩阵方法，推导得到微定位平台的整体柔度模型；最后，综合压电薄膜梁模型和平台柔度模型得到平台的整体输出模型．通过有限元仿真分析微定位平台的输出位移和转角，并与理论计算结果进行对比验证．结果显示，仅有1个驱动器作用时，输出位移和转角理论计算结果与有限元分析结果的相对误差分别为5.4%和5.5%；3个驱动器共同作用时，输出位移理论结果与有限元分析结果的相对误差为11.6%．

Abstract: A flexure hinge based 3-DOF (degree of freedom) micro-positioning stage is designed, which is driven by piezoelectric-film beam. In order to accurately predict the performance of the micro-positioning stage, a theoretical modeling and analysis method is further proposed. The output model of the piezoelectric-film beam is first established on the basis of Euler-Bernouli beam theory and the piezoelectric constitutive equation under force balance conditions. Based on the compliance matrix method, the compliance model of the micro-positioning stage is then built. Accordingly, the output model of the micro-positioning stage is derived by incorporating the piezoelectric-film beam model and the mechanism compliance model. By FEA (finite-element-analysis), the displacement and rotation angle output by the micro-positioning stage are analyzed, and compared with the theoretical computation results. The comparison results show that the maximum deviations between the theoretical and simulation results are 5.4% for translation and 5.5% for rotation when only one piezoelectric-film actuator works, and the maximum deviation for output displacements is 11.6% when the three piezoelectric-film actuators work together.

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