引用本文: 杜志元, 闫鹏. 基于桥式放大机构的柔顺微定位平台的研究[J]. 机器人, 2016, 38(2): 185-192.
DU Zhiyuan, YAN Peng. Analysis on Compliant Micro Positioning Stage Based on Bridge-type Amplification Mechanism[J]. ROBOT, 2016, 38(2): 185-192.
 Citation: DU Zhiyuan, YAN Peng. Analysis on Compliant Micro Positioning Stage Based on Bridge-type Amplification Mechanism[J]. ROBOT, 2016, 38(2): 185-192.

## Analysis on Compliant Micro Positioning Stage Based on Bridge-type Amplification Mechanism

• 摘要: 在微位移定位平台设计中，为充分利用桥式机构放大比高的优势，同时使其具有较高的定位精度，在桥式机构的基础上引入了运动导向机构，设计了一种改进型的柔顺微位移定位平台．根据材料力学原理和卡氏定理，推导了该定位平台的放大倍数和固有频率表达式．然后通过有限元软件，对微定位平台的放大倍数和固有频率进行仿真，并与理论计算结果进行了分析对比．最后搭建了微定位实验系统来测试所设计的平台的性能．实验结果表明：该改进型平台的放大比为 6.4，固有频率为 345.0 Hz．理论模型与有限元仿真得到的放大倍数和固有频率的相对误差分别为 2.9% 和 3.6%，与实验测得的放大比和固有频率的相对误差分别为 6.7% 和 6.8%．实验结果验证了理论模型的正确性．

Abstract: In the design of micro positioning stage, a motion guiding mechanism is introduced based on bridge-type mechanism in order to take full advantage of large amplification of bridge type mechanism and achieve a high positioning accuracy at the same time, and an improved micro-positioning stage is designed. The displacement amplification ratio and natural frequency formulas of the stage are derived based on theory of materials and Castigliano's theorem. Then the displacement amplification and natural frequency of the stage are simulated by the finite element method, and the results are compared with that computed by the theoretical model. Finally, the micro-positioning system is set up to test the proposed stage. The experimental results demonstrate that the proposed stage has a displacement amplification ratio of 6.4 and a natural frequency of 345.0 Hz. The relative errors of the amplification ratio and the natural frequency between the theoretical model and the finite element simulation are 2.9% and 3.6%, respectively. The relative errors of the amplification ratio and the natural frequency between the theoretical model and experimental tests are 6.7% and 6.8%, respectively. The test results verify the correctness of the theoretical model.

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