Abstract: According to the characteristics of high acceleration and precision linear motor direct drive motion stage,global coupling dynamic modeling and analysis are performed in a wide bandwidth.The bond graph approach is used to build the global coupling dynamic model of motion stage,in which electrical parts,mechanical parts,flexible connection,and nonlinear friction in the system are considered.Based on the model,the influence of motor mechanical time constant,electrical time constant,friction and bolted connection on the system response performance are analyzed by Matlab/Simulink simulation language.The proposed model and analysis results reflect the basic features of this stage and influen'cing factors that can be ignored or need to be considered in system analysis and control.It lays a foundation for motor selection,system construction, trajectory planning and control algorithms design.