宏/微驱动定位系统滑模变结构控制的研究

SLIDING MODE VARIABLE STRUCTURE CONTROL OF A MACRO/MICRO DRIVE POSITIONING SYSTEM

摘要: 研究了具有宏/微双重驱动定位工作台的滑模变结构控制技术．该工作台采用直线电机进行大行程位移驱动，来保证较大的工作行程和较快的响应速度，采用压电陶瓷微位移器完成精密位移驱动，利用光栅尺实现闭环位移反馈，可以实现100mm的工作行程，0.01μm的重复定位精度．

Abstract: In this paper,a sliding mode variable structure control method is proposed for a macro/micro dual-drive positioning system. A linear motor and a PZT actuator is adopted in this system to drive the platform,so large travel and fast response are ensured. A linear encoder is utilized to realize closed-loop displacement feedback. As a result,the system gets a travel range of 100mm and a postioning repeatability of 0.01μm.