Abstract: his paper developes a method for the kinematic analysis of a six-degree-of-freedom mechanismfor micromotion. The mechanism has three PP-R-S parallel chains in which all the kinematic pairs are designed as flexure kinges to avoid mechanical clearance, By means of coordinate transformation,the relation-ship between the input and the output micro-displacements of the mechanism is obtained. Because the rangeof motion of the flexure hinges is limited by material intensity, the micro-displacements of the flexure hingesare also established in relation to the output micro-displacements for the purpose of design.