集成位置/力传感器的桥式压电微夹持器

A Bridge-type Piezoelectric Microgripper with Integrated Position/Force Sensors

  • 摘要: 针对微操作和微装配任务中起着至关重要作用的微夹持器的设计问题,考虑其对大行程、平动夹持和集成位置/夹持力检测的要求,采用桥式放大机构和平形四边形机构,设计了一种柔顺压电微夹持器.根据机械原理和柔顺机构学,推导了微夹持器的理论放大倍数、固有频率和输出耦合比.然后通过ANSYS软件,对微夹持器的放大倍数、固有频率和输出耦合比进行了仿真,最后建立了实验测控系统来验证该微夹持器的性能.实验结果表明:该微夹持器的夹持范围为0.345μm~328.2μm,放大倍数为16.4,固有频率为157.5Hz,ANSYS仿真与实验测得的放大倍数和固有频率的相对误差分别为17.7%和12.9%,实验结果验证了理论模型和有限元仿真的正确性,实现了大行程、平动夹持和集成位置/力传感器的设计目标.

     

    Abstract: Microgrippers play an important role in micromanipulation and microassembly tasks. Based on the bridge-type mechanisms and parallelogram mechanisms, a compliant piezo-driven microgripper is designed in consideration of its demand for large gripping ranges, parallel movements and integrated position/force sensors. According to mechanical principles and compliant mechanism theory, the theoretical amplification ratio, natural frequency and output coupling ratio of the microgripper are derived. Then, the ANSYS software is used to simulate the amplification ratio, natural frequency and output coupling ratio of the microgripper. Finally, an experimental system is set up to verify the performances of the microgripper. The experimental results demonstrate that the microgripper has a gripping range of 0.345μm~328.2μm, an amplification ratio of 16.4 and a natural frequency of 157.5 Hz. The relative errors of the amplification ratio and the natural frequency between ANSYS simulations and experimental results are 17.7% and 12.9% respectively. The validity of theoretical models and ANSYS simulations are proved by experimental results, and the design objectives of large gripping ranges, parallel movements and integrated position/force sensors are achieved.

     

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