Abstract: To achieve high-speed and high-precision measurements using atomic force microscopy (AFM), a novel compound AFM system structure is proposed. The structure adopts modular design, with the top module utilizing a three-axis piezoelectric nanoplatform with a large-stroke, low-speed Z-scanner, and the bottom module employing a laser-followed optical structure with a small-stroke, high-speed Z-scanner (2 μm stroke). The bottom module is serially connected and fixed to the low-speed Z-direction scanner of the three-axis nanoplatform, enabling optical path follow-up during the scanning process. This serial configuration of two scanners with differing bandwidths and strokes accommodates the requirements for large-scale height measurements and high-speed scanning, achieving a scanning speed that is 4 times greater than that of traditional single scanners. Additionally, an online and dynamic self-tuning control strategy for scanner sensitivity parameters is proposed to address the issue of nonlinearity in the high-speed Z-direction scanner, which affects measurement accuracy. This strategy effectively mitigates sensitivity variations caused by the nonlinearity of the piezoelectric ceramics, thereby enabling high-precision measurements.