Abstract：Visual servo control is necessary for micromanipulator so as to achieve accurate motion and automatic manipulation. This paper investigates the method for implementing visual servo control of robotic micromanipulator. Firstly, the visual servo architecture suitable for micromanipulator is discussed. Then the system model for a 3DOF flexible joint based micromanipulator with 2-D micro vision is built aiming at the dual-hand robotic micromanipulation system for bioengineering. According to the characteristics of piezoelectric actuator controller, the implementation method for a kind of PID visual servo control law is proposed. In the experiments concerning point-to-point motion and circle trajectory tracking, it was demonstrated that the kinematic model errors caused by such factors as rough calibration and environmental varieties are complemented by visual servo control.
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