基于桥式放大机构的柔顺微定位平台的研究

doi:10.13973/j.cnki.robot.2016.0185

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引用本文:
杜志元, 闫鹏. 基于桥式放大机构的柔顺微定位平台的研究[J]. 机器人, 2016, 38(2): 185-192.DOI: 10.13973/j.cnki.robot.2016.0185. DU Zhiyuan, YAN Peng. Analysis on Compliant Micro Positioning Stage Based on Bridge-type Amplification Mechanism. ROBOT, 2016, 38(2): 185-192. DOI: 10.13973/j.cnki.robot.2016.0185.

摘要

在微位移定位平台设计中，为充分利用桥式机构放大比高的优势，同时使其具有较高的定位精度，在桥式机构的基础上引入了运动导向机构，设计了一种改进型的柔顺微位移定位平台．根据材料力学原理和卡氏定理，推导了该定位平台的放大倍数和固有频率表达式．然后通过有限元软件，对微定位平台的放大倍数和固有频率进行仿真，并与理论计算结果进行了分析对比．最后搭建了微定位实验系统来测试所设计的平台的性能．实验结果表明：该改进型平台的放大比为 6.4，固有频率为 345.0 Hz．理论模型与有限元仿真得到的放大倍数和固有频率的相对误差分别为 2.9% 和 3.6%，与实验测得的放大比和固有频率的相对误差分别为 6.7% 和 6.8%．实验结果验证了理论模型的正确性．

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关键词 ：桥式放大机构, 运动导向机构, 柔顺定位平台, 卡氏定理

Abstract：

In the design of micro positioning stage, a motion guiding mechanism is introduced based on bridge-type mechanism in order to take full advantage of large amplification of bridge type mechanism and achieve a high positioning accuracy at the same time, and an improved micro-positioning stage is designed. The displacement amplification ratio and natural frequency formulas of the stage are derived based on theory of materials and Castigliano's theorem. Then the displacement amplification and natural frequency of the stage are simulated by the finite element method, and the results are compared with that computed by the theoretical model. Finally, the micro-positioning system is set up to test the proposed stage. The experimental results demonstrate that the proposed stage has a displacement amplification ratio of 6.4 and a natural frequency of 345.0 Hz. The relative errors of the amplification ratio and the natural frequency between the theoretical model and the finite element simulation are 2.9% and 3.6%, respectively. The relative errors of the amplification ratio and the natural frequency between the theoretical model and experimental tests are 6.7% and 6.8%, respectively. The test results verify the correctness of the theoretical model.

Key words： bridge-type amplification mechanism motion guiding mechanism compliant positioning stage Castigliano's theorem

收稿日期: 2016-01-18 录用日期: 2016-03-01

TH112.5

基金资助:

国家自然科学基金（61327003）

通讯作者: 闫鹏，yanpeng@sdu.edu.cn E-mail: yanpeng@sdu.edu.cn

作者简介: 杜志元（1989-），男，硕士生.研究领域：柔顺机构的建模、设计和控制.
闫鹏（1975-），男，博士，教授.研究领域：精密机电系统的设计，鲁棒非线性控制理论.

链接本文:

https://robot.sia.cn/CN/10.13973/j.cnki.robot.2016.0185 或 https://robot.sia.cn/CN/Y2016/V38/I2/185

[1] 孙麟治, 李鸣鸣, 程维明.精密定位技术研究[J].光学精密工程, 2005, 9(z1):69-75.Sun L Z, Li M M, Cheng W M. Study on precision positioning technique[J]. Optics and Precision Engineering, 2005, 9(z1): 69-75.

[2] Fujii Y, Maru K, Jin T. Method for evaluating the electrical and mechanical characteristics of a voice coil actuator[J]. Precision Engineering, 2010, 34(4): 802-806.

[3] Zubir M N M, Srinzadeh B, Tian Y L. A new design of piezoelectric driven compliant-based microgripper for micromanipulation[J]. Mechanism and Machine Theory, 2009, 44(12): 2248-2264.

[4] Schitter G, Astroem K J, DeMartini B E, et al. Design and modeling of a high-speed AFM-scanner[J]. IEEE Transactions on Control Systems Technology, 2007, 15(5): 906-915.

[5] Chu C L, Fan S H. A novel long-travel piezoelectric-driven linear nanopositioning stage[J]. Precision Engineering, 2006, 30(1): 85-95.

[6] Li Y M, Xu Q S. Modeling and performance evaluation of a flexure-based XY parallel micromanipulator[J]. Mechanism and Machine Theory, 2009, 44(13): 2127-2152.

[7] Tian Y L, Shirinzadeh B, Zhang D W, et al. Development and dynamic modelling of a flexure-based Scott-Russell mechanism for nano-manipulation[J]. Mechanical Systems and Signal Processing, 2009, 23(3): 957-978.

[8] Ni Y, Deng Z Q, Wu X, et al. Modeling and analysis of an over-constrained flexure-based compliant mechanism[J]. Measurement, 2014, 50(1): 270-278.

[9] Lobontiu N, Garcia E. Analytical model of displacement amplification and stiffness optimization for a class of flexure-based compliant mechanisms[J]. Computers and Structures, 2003, 81(32): 2797-2810.

[10] Xu Q S, Li Y M. Analytical modeling, optimization and testing of a compound bridge-type compliant displacement amplifier[J]. Mechanism and Machine Theory, 2011, 46(2): 183-200.

[11] 叶果, 李威, 王禹桥, 等.柔性桥式微位移机构位移放大比特性研究[J].机器人, 2011, 33(2):251-256.Ye G, Li W, Wang Y Q, et al. Analysis on displacement amplification ratio of a flexible bridge-type micro-displacement mechanism[J]. Robot, 2011, 33(2): 251-256.

[12] Kim J H, Kim S H, Kwak Y K. Development and optimization of 3-D bridge-type hinge mechanisms[J]. Sensors and Actuators, A: Physical, 2004, 116(3): 530-538.

[13] 张兆成, 苏继军, 胡泓.桥式直接耦合柔性机构的优化设计方法[J].机器人, 2010, 32(1):119-124.Zhang Z C, Su J J, Hu H. Optimum design of bridge-type compliant mechanism with direct coupling[J]. Robot, 2010, 32(1): 119-124.

[14] Lobontiu N, Paine J S N, Garcia E, et al. Corner-filleted flexure hinges[J]. Journal of Mechanical Design, 2001, 123(3): 346-352.

[15] Ma H W, Yao S M, Wang L Q, et al. Analysis of the displacement amplification ratio of bridge-type flexure hinge[J]. Sensors and Actuators, A: Physical, 2006, 132(2): 730-736.

[16] 杜志元, 刘鹏博, 闫鹏, 等.一种微位移纳米定位系统的机械特性分析与控制[C]//第26届中国控制与决策会议论文集.2014:4682-4687.Du Z Y, Liu P B, Yan P, et al. Mechanical analysis and control of a novel nanopositioner[C]//26th Chinese Control and Decision Conference. 2014: 4682-4687.