直线超声电机驱动的并联微操作手的结构设计

doi:10.13973/j.cnki.robot.2015.0573

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引用本文:
王赟, 姚志远, 耿冉冉. 直线超声电机驱动的并联微操作手的结构设计[J]. 机器人, 2015, 37(5): 573-580.DOI: 10.13973/j.cnki.robot.2015.0573. WANG Yun, YAO Zhiyuan, GENG Ranran. Structure Design of a Parallel Micromanipulator Driven by Linear Ultrasonic Motors. ROBOT, 2015, 37(5): 573-580. DOI: 10.13973/j.cnki.robot.2015.0573.

摘要

提出一种基于直线超声电机驱动的两指微操作手，它具有纳米级的定位精度，其操作空间在毫米级的范围，提高了微操作手的实用性.该操作手采用并联机构，以直线超声电机作为滑动副驱动微操作手，以柔性铰链作为转动副.利用机构学分析了微操作手的运行机理.利用 ADAMS 软件建立了微操作手的运动学模型，分析了微操作手的输出特性，包括探针在时域的位置、速度和加速特性，以及操作空间.直线超声电机的使用简化了微操作手的结构，增加了操作空间.柔性铰链作为转动副能够保证纳米级的定位精度.微操作手原型机的初步试验表明，它能够用于微小颗粒的实时抓取，其探针的位移分辨率达到 100nm，工作位移达到 2mm.

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关键词 ：微操作手, 直线超声电机, 大行程, 并联机构

Abstract：

A two-finger micromanipulator driven by linear ultrasonic motors is proposed, which has the nanoscale positional accuracy and the millimeter-scale operating space, thus the practicability of micromanipulator is improved.A design scheme based on parallel mechanism is demonstrated.Linear ultrasonic motors are taken as the sliding pairs and flexure hinges are taken as the revolute pairs to drive the micromanipulator.Mechanism theory is used to explain how the micromanipulator works.Kinematics model is established by the ADAMS software to analyze the output characteristics, including the size of operating space, and the relation between the time and the position, velocity, acceleration of the probe.Linear ultrasonic motors are used to simplify the structure and increase the operating space of the micromanipulator.Flexure hinges as revolute pairs can ensure a nanoscale positional accuracy.A prototype of the micromanipulator is fabricated and preliminary experiments are conducted.Experiments show that the proposed micromanipulator can realize real-time operation of micro particles, the position resolution of its probe achieves 100 nm, and the working displacement of the micromanipulator achieves 2 mm.

Key words： micromanipulator linear ultrasonic motor large stroke parallel mechanism

收稿日期: 2015-03-14 录用日期: 2015-07-20

TP24

基金资助:

国家973计划（2011CB707602）；国家自然科学基金（51275229）；国家重大仪器设备开发专项（2012YQ100225）

通讯作者: 王赟，wangyun@nuaa.edu.cn E-mail: wangyun@nuaa.edu.cn

作者简介: 王赟（1990-），男，硕士生.研究领域:微操作手，直线超声电机.
姚志远（1961-），男，博士，教授.研究领域:V型直线超声电机设计及应用，振动利用及控制.
耿冉冉（1987-），女，博士生.研究领域:微操作手，直线超声电机.

链接本文:

https://robot.sia.cn/CN/10.13973/j.cnki.robot.2015.0573 或 https://robot.sia.cn/CN/Y2015/V37/I5/573

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