Manufacturing and Wireless Driving of a Permanent Magnetic Micro-robot
LI Xuanying, LI Zhenbo, MAO Ling, ZHANG Dawei, TANG Xiaoning, CHEN Jiapin
Key Laboratory for Thin Film and Microfabrication of Ministry of Education, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China
This paper presents a new method to fabricate permanent magnetic (NdFeB) micro-robot as well as a motion-control algorithm that leads to "vibration-slip" motion of the micro-robot. MEMS (micro-electro-mechanical system) based graphical photolithography is introduced in robot fabricating process. A customized drive coil system for motion-control is designed. With its uniformly distributed magnetic field, the central cube space inside the coil system with a length of 2.5cm is set for micro-robot motion. The configuration of the whole embedded system for coil system driving is introduced. A dynamic model of the micro-robot is established, and mathematical simulation of its "vibration-slip" motion mode is carried out. Linear 2D motion is demonstrated on the micro-robot in experiment. The result indicates that the magnetic micro-robot's wireless linear motion speed reaches an average of 10 mm/s.
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