SEM-based Tele-nanomanipulation System with Virtual 3D Visualand Force Interaction
LI Dongjie1,2, RONG Weibin1, SUN Lining1, XIAO Wanzhe1, ZOU Yu1
1. State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin 150001, China;
2. Institute of Electrical Control and Automation Technology, Harbin University of Science and Technology, Harbin 150080, China
李东洁, 荣伟彬, 孙立宁, 肖万哲, 邹宇. 基于虚拟3D视觉和力觉交互的SEM遥纳操作系统[J]. 机器人, 2013, 35(1): 52-59,66.DOI: 10.3724/SP.J.1218.2013.00052.
LI Dongjie, RONG Weibin, SUN Lining, XIAO Wanzhe, ZOU Yu. SEM-based Tele-nanomanipulation System with Virtual 3D Visualand Force Interaction. ROBOT, 2013, 35(1): 52-59,66. DOI: 10.3724/SP.J.1218.2013.00052.
In order to increase the interaction of nanomanipulation, a tele-nanomanipulation platform with virtual 3D visual feedback and virtual force sense feedback is built by combining with the virtual reality technology and the force feedback device. To ensure that the virtual environment is able to reflect the real nanomanipulation environment accurately, the collision detection and force sensing rendering of the virtual model is designed in detail. The virtual match link between the force feedback device and virtual environment is introduced to ensure the stability of the force interaction interface and to increase the coordination of the master control module. Aiming at the accurate nanomanipulation, the image characteristics extraction method based on the region of interest is adopted to exact the depth information of probe. Then the relationship of image fuzzy degree and the distance between the probe and the substrate is quickly established, and the closed-loop control of the probe is realized. Finally, with the developed platform and the proposed method, the shift experiments of single ZnO nanowire are completed.
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