2-DOF并联柔性结构微动平台的新构型及尺寸优化

doi:10.13973/j.cnki.robot.2016.0352

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崔玉国, 阮超, 马剑强, 郑绍雍, 淳华. 2-DOF并联柔性结构微动平台的新构型及尺寸优化[J]. 机器人, 2016, 38(3): 352-359.DOI: 10.13973/j.cnki.robot.2016.0352. CUI Yuguo, RUAN Chao, MA Jianqiang, ZHENG Shaoyong, CHUN Hua. New Configuration and Size Optimization of a 2-DOF Parallel Micro-positioning Stage with Flexible Structure. ROBOT, 2016, 38(3): 352-359. DOI: 10.13973/j.cnki.robot.2016.0352.

摘要为了获得具有良好静、动态特性的 2-DOF 并联柔性结构微动平台，在给出平台新构型的基础上，对其进行尺寸优化设计．基于 Stewart 并联机构思想并对其进行相应的结构改变，设计出了具有对称双圆弧薄板式弹性单元体的 2-DOF 并联柔性结构微动平台新构型．采用悬臂曲梁变形理论给出了平台各方向的刚度表达式，进而通过加权组合法建立了综合考虑各方向刚度的平台尺寸优化的统一目标函数；采用序列二次规划（SQP）法对所建立的数学模型进行了求解．通过实验测试了优化平台与未优化平台的静、动态特性，结果表明：在 150 V 驱动电压作用下，优化平台 x、y 方向的位移分别为 22.98μm、23.15 μm，满足设计要求；优化平台x、y、z 方向的固有频率分别为 1.731 kHz、1.722 kHz、1.725 kHz，在各方向的动态特性更加均衡；在 50 N 阶跃输入力作用下，优化平台 x、y 方向的响应时间分别为 18 ms、20 ms，明显快于未优化平台．

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	崔玉国
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关键词 ：微动平台, 并联结构, 圆弧形柔性薄板, 尺寸优化, 有限元分析

Abstract：In order to obtain 2-DOF parallel flexible-structure micro-positioning stage with good static and dynamic characteristics, a new stage configuration is proposed, which is optimized by a size optimization method. The principle and modified morphology of the Stewart parallel mechanism is applied to designing the stage structure, and a new configuration with elastic elements of dual arc thin plates is designed for 2-DOF parallel flexible-structure micro-positioning stage. The stiffness expression in all directions of the stage is given with the deformation theory of curved cantilever beam. And through summating the stiffness expression in all directions, a unified objective function for size optimization of the stage is established by weighted combination approach. Then the mathematical model is solved using sequential quadratic programming (SQP). The static and dynamic characteristics of the stage before and after optimization are tested experimentally. The results show that: the displacements of the optimized stage in x and y directions are 22.98μm and 23.15μm at the driving voltage of 150 V, meeting the design requirements. The natural frequencies of the optimized stage in x, y, z directions are 1.731 kHz, 1.722 kHz and 1.725 kHz. The dynamic characteristics of the optimized stage are more equal in each direction. The response time of the optimized stage in x and y directions at the input step force of 50 N are 18 ms and 20 ms, which are shorter obviously after optimization.

Key words： micro-positioning stage parallel structure flexible arc-plate size optimization finite element analysis

收稿日期: 2015-12-31 录用日期: 2016-04-25

TP242

基金资助:国家自然科学基金（51175271）；教育部留学回国人员科研启动基金；浙江省高等学校中青年学科带头人学术攀登项目（pd2013091）

通讯作者: 崔玉国，cuiyuguo@nbu.edu.cn E-mail: cuiyuguo@nbu.edu.cn

作者简介: 崔玉国（1971-），男，博士后，教授，博士生导师．研究领域：微/纳米定位技术、精密测试技术．
阮超（1989-），男，硕士生．研究领域：微/纳米定位技术．
马剑强（1983-），男，博士，讲师．研究领域：压电微执行器与微传感器．

链接本文:

https://robot.sia.cn/CN/10.13973/j.cnki.robot.2016.0352 或 https://robot.sia.cn/CN/Y2016/V38/I3/352

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