基于平面柔顺机构的θxθyZ微动台静力学分析及优化设计

doi:10.13973/j.cnki.robot.2016.0557

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魏华贤, 李威, 杨雪锋, 王禹桥, 王承涛. 基于平面柔顺机构的θ_xθ_yZ微动台静力学分析及优化设计[J]. 机器人, 2016, 38(5): 557-562.DOI: 10.13973/j.cnki.robot.2016.0557. WEI Huaxian, LI Wei, YANG Xuefeng, WANG Yuqiao, WANG Chengtao. Static Analysis and Optimal Design of θ_xθ_yZ Micropositioner withPlanar Compliant Mechanisms. ROBOT, 2016, 38(5): 557-562. DOI: 10.13973/j.cnki.robot.2016.0557.

摘要设计了基于平面柔顺机构的θ_xθ_yZ微动台．只考虑平面柔顺机构的平面内变形建立其静力学分析过程，对各支腿对动平台的作用进行独立分析．通过卡氏位移定理求得输入输出之间的转换关系，并建立了平面支腿位移放大比与结构尺寸的直接关系，基于遗传算法进行了结构尺寸优化．最后完成了样机有限元分析及实验研究，结果验证了分析及优化方法的可靠性，理论模型与有限元仿真及实验结果的误差分别小于4%和12%．

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关键词 ：柔性铰链, θ_xθ_yZ微动台, 静力学, 尺寸优化

Abstract：A θ_xθ_yZ micropositioner is developed based on planar compliant mechanism. The static analysis is completed where only the planar deformation of each leg is taken into consideration. The effects of each leg on the mobile platform are analyzed separately. The Castigliano's theorem is utilized to derive the relationships between inputs and outputs. The relation between the displacement amplification of each planar leg and the structure dimensions is formulated. Then, the dimension parameters are optimized by means of genetic algorithm. Finally, the finite element analysis (FEA) and the experimental tests on two prototypes are accomplished. The results show that the static analysis and optimization method are reliable. The errors between the analytical model and the FEA are less than 4% while the errors between the analytical model and the experimental tests are less than 12%.

Key words： flexure hinge θ_xθ_yZ micropositioner statics dimension optimization

收稿日期: 2016-01-21 录用日期: 2016-07-22

ZTFLH:

TP24

基金资助:国家自然科学基金（51305444）；江苏省“六大人才高峰”计划（ZBZZ-041）；江苏高校研究生科研创新计划（KYLX15_1421）；江苏高校优势学科建设工程（PAPD）

通讯作者: 李威，liweicumt@163.com E-mail: liweicumt@163.com

作者简介: 魏华贤（1989-），男，博士生．研究领域：微操作并联机器人．
李威（1964-），男，博士，教授．研究领域：机电系统智能控制，微机电系统设计及应用．
杨雪锋（1979-），男，博士，副教授．研究领域：微机电系统设计及应用．

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https://robot.sia.cn/CN/10.13973/j.cnki.robot.2016.0557 或 https://robot.sia.cn/CN/Y2016/V38/I5/557

[1] 付锦江,颜昌翔,刘伟,等.快速控制反射镜两轴柔性支撑平台刚度优化设计[J].光学精密工程,2015,23(12):3378-3386.Fu J J, Yan C X, Liu W, et al. Stiffness optimization of two-axis flexible supporting platform for fast steering mirror[J]. Optics and Precision Engineering, 2015, 23(12):3378-3386.
[2] Du Z, Su Y, Yang W, et al. Note:A piezo tip/tilt platform:Structure, kinematics, and experiments[J]. Review of Scientific Instruments, 2014, 85(4):No.046102.
[3] Lobontiu N. Compliant mechanisms:Design of flexure hinges[M]. Boca Raton, USA:CRC Press, 2002:472.
[4] 王华,张宪民.整体式空间3自由度精密定位平台的优化设计与试验[J].机械工程学报,2007,43(3):66-71.Wang H, Zhang X M. Optimal design and experimental research for monolithic space 3-DOF precise positioning stage[J]. Chinese Journal of Mechanical Engineering, 2007, 43(3):66-71.
[5] Kim H, Kim J, Ahn D, et al. Development of a nanoprecision 3-DOF vertical positioning system with a flexure hinge[J]. IEEE Transactions on Nanotechnology, 2013, 12(2):234-245.

[6] 栾玉亮,荣伟彬,孙立宁.基于有限元方法的3-PPSR大长径比柔性并联机器人刚度模型分析[J].机器人,2014,36(6):730-736.Luan Y L, Rong W B, Sun L N. Analysis on stiffness model of 3-PPSR flexible parallel robot with high aspect ratio based on finite element method[J]. Robot, 2014, 36(6):730-736.
[7] 王赟,姚志远,耿冉冉.直线超声电机驱动的并联微操作手的结构设计[J].机器人,2015,37(5):573-580.Wang Y, Yao Z Y, Geng R R. Structure design of a parallel micromanipulator driven by linear ultrasonic motors[J]. Robot, 2015, 37(5):573-580.
[8] Reymond C, Le Gall B, Mohamed B. Ultra-high precision robotics:A potentially attractive area of interest for MM and IFToMM[M]//Technology Developments:The Role of Mechanism and Machine Science and IFToMM. Berlin, Germany:Springer, 2011:439-450.
[9] Kim H S, Cho Y M. Design and modeling of a novel 3-DOF precision micro-stage[J]. Mechatronics, 2009, 19(5):598-608.

[10] Lee H J, Kim H C, Kim H Y, et al. Optimal design and experiment of a three-axis out-of-plane nano positioning stage using a new compact bridge-type displacement amplifier[J]. Review of Scientific Instruments, 2013, 84(11):No.115103.
[11] Du Z J, Shi R C, Dong W. A piezo-actuated high-precision flexible parallel pointing mechanism:Conceptual design, development, and experiments[J]. IEEE Transactions on Robotics, 2014, 30(1):131-137.

[12] Tian Y, Shirinzadeh B, Zhang D, et al. Modelling and analysis of a three-revolute parallel micro-positioning mechanism[J]. Proceedings of the Institution of Mechanical Engineers, Part C:Journal of Mechanical Engineering Science, 2011, 225(5):1273-1286.

[13] 叶果,李威,王禹桥,等.柔性桥式微位移机构位移放大比特性研究[J].机器人,2011,33(2):251-256.Ye G, Li W, Wang Y Q, et al. Analysis on displacement amplification ratio of a flexible bridge-type micro-displacement mechanism[J]. Robot, 2011, 33(2):251-256.
[14] Lobontiu N. Compliance-based matrix method for modeling the quasi-static response of planar serial flexure-hinge mechanisms[J]. Precision Engineering——Journal of the International Societies for Precision Engineering and Nanotechnology, 2014, 38(3):639-650.
[15] 余跃庆,周鹏.柔顺机构PR伪刚体模型[J].北京工业大学学报,2013,39(5):641-647.Yu Y Q, Zhou P. PR pseudo-rigid-body model of compliant mechanisms[J]. Journal of Beijing University of Technology, 2013, 39(5):641-647.
[16] Shi R C, Dong W, Du Z J. Design methodology and performance analysis of application-oriented flexure hinges[J]. Review of Scientific Instruments, 2013, 84(7):No.75005.
[17] 杜志元,闫鹏.基于桥式放大机构的柔顺微定位平台的研究[J].机器人,2016,38(2):185-192.Du Z Y, Yan P. Analysis on compliant micro positioning stage based on bridge-type amplification mechanism[J]. Robot, 2016, 38(2):185-192.