Abstract：A micromanipulator is one of the key components for a micromanipulating robot. Based on the principle of piezoelectric scanner, a three degree-of-freedom micromanipulator driven by piezoelectric tubes was developed in this paper. Thanks to static analysis of the deflection of piezoelectric tube sectioned into four quadrants, the formula establishing the relationship between microdisplacement and driving voltage was deduced. Then, the measuring circuit is developed. As a result, the integration of mechanism, actuator and sensor was realized. Meantime, a micropositioning close-loop control experimental system is designed. The static and the dynamic detections were finished successfully. Some key technical parameters for the micromanipulator were given. Experiments show that the micromanipulator can be applied to some micromanipulations with micro-nano-meter accuracy.
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