一种带力传感的微夹持器设计及试验

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韩江义, 游有鹏, 王化明, 朱剑英. 一种带力传感的微夹持器设计及试验[J]. 机器人, 2009, 31(1): 67-71.. HAN Jiang-yi, YOU You-peng, WANG Hua-ming, ZHU Jian-ying. Design and Experimentation of a Micro-gripper with Force Sensing. ROBOT, 2009, 31(1): 67-71..

摘要设计制作一种带力传感的微夹持器，通过压电陶瓷堆驱动和柔性铰链放大来实现夹持动作，由粘贴于悬臂应变梁的半导体应变片构成惠斯通电桥测量微夹持力．优化设计了柔性铰链的结构，对悬臂式应变梁进行了仿真分析．最后，制作并组装成微夹持器，进行了力传感标定试验和微夹持操作试验．制作和试验结果验证了这种带力传感的微夹持器的可行性和实用性．

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	韩江义
	游有鹏
	王化明
	朱剑英
	韩江义
	游有鹏
	王化明
	朱剑英

关键词 ：微操作, 柔性铰链, 力传感, 微操作, 柔性铰链, 力传感

Abstract：A micro-gripper with force sensing is designed,and clamping motion is realized through piezoelectric ceramic stack actuation and flexible-hinge enlargement.Wheatstone bridge consisting of semiconductor strain-gauge stuck on the strain cantilever is used to measure the micro-clamping force.The structure of the flexible-hinge is optimized,and simulation analysis on the strain cantilever is carded out.Finally,the micro-gripper is fabricated and assembled,and calibration ex- periment of force sensing and micro-gripper operation experiment are carried out.Results from fabrication and experiments testify the feasibility and practicability of the presented micro-gripper with clamping force sensing.

Key words： micromanipulation flexible-hinge force sensing

收稿日期: 2008-06-16

TP241.3

基金资助:国家自然科学基金资助项目（50605031）

作者简介: 韩江义（1974- ）男，博十生．研究领域：微机电系统．
游有鹏（1906- ）男，教授，博士生导师．研究领域：机械电子工程，微机电系统．
王化明（1937- ）男，副教授，硕士生导师．研究领域：机械电子工程，微机电系统．

链接本文:

https://robot.sia.cn/CN/ 或 https://robot.sia.cn/CN/Y2009/V31/I1/67

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