基于MEMS技术的SU-8仿昆虫微扑翼飞行器设计及制作

Design and Fabrication of an SU-8 Biomimetic Flapping-wing Micro Air Vehicle by MEMS Technology

摘要: 为研制一种轻质仿昆虫微扑翼飞行器，提出了采用微机电系统（MEMS）领域的SU-8光刻胶作为结构材料的制作方案．基于仿生学原理和微机电系统加工技术，设计微扑翼飞行器结构及MEMS工艺方法．研究结果表明，该种结构设计及制作方案满足设计要求，为仿昆虫微扑翼飞行器的研制提供了一种很好的途径．

Abstract: To develop a light biomimetic flapping-wing micro air vehicle,SU-8 photoresist in micro-electromechanical system(MEMS)field is used as its structural materials.Based on the bionics principle and MEMS technology,the structure and MEMS fabrication process are designed.The results show that this kind of structural design and production solution meet design requirements,and provide a good way for design and fabrication of flapping-wing micro air vehicle.