李宁宁, 赵铁石. 并联式四自由度定位平台误差分析[J]. 机器人, 2008, 30(3): 223-230.
引用本文: 李宁宁, 赵铁石. 并联式四自由度定位平台误差分析[J]. 机器人, 2008, 30(3): 223-230.
LI Ning-ning, ZHAO Tie-shi. Error Analysis of a 4-DOF Parallel Positioning Platform[J]. ROBOT, 2008, 30(3): 223-230.
Citation: LI Ning-ning, ZHAO Tie-shi. Error Analysis of a 4-DOF Parallel Positioning Platform[J]. ROBOT, 2008, 30(3): 223-230.

并联式四自由度定位平台误差分析

Error Analysis of a 4-DOF Parallel Positioning Platform

  • 摘要: 设计了一种应用于扫描电镜的四自由度并联定位平台.该平台结构简单,便于集成微操作装置和实现微结构物性在线检测.为使所设计的定位平台具有高的定位精度,建立了平台的误差矢量模型.通过模拟仿真手段分析了结构误差和上平台分支分布对平台末端定位精度的影响,分析了在大载荷作用下机构在非自由度方向产生的角位移输出.

     

    Abstract: A 4-DOF(degree of freedom) parallel positioning platform used in the SEM(scanning electron microscope) is designed.The platform is of simple structure,and easy to integrate micro-operating mechanisms and realize online detection of microstructure's physical performances.The error vector model of the platform is established to realize the high precision positioning platform.Effect of the structure errors and the distribution of upper-stage limbs on the positioning precision of platform's end is analyzed through simulation and emulation.Its output angle displacement in non-DOF directions when operating with biggish load is discussed.

     

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