李东洁, 荣伟彬, 孙立宁, 肖万哲, 邹宇. 基于虚拟3D视觉和力觉交互的SEM遥纳操作系统[J]. 机器人, 2013, 35(1): 52-59,66. DOI: 10.3724/SP.J.1218.2013.00052
引用本文: 李东洁, 荣伟彬, 孙立宁, 肖万哲, 邹宇. 基于虚拟3D视觉和力觉交互的SEM遥纳操作系统[J]. 机器人, 2013, 35(1): 52-59,66. DOI: 10.3724/SP.J.1218.2013.00052
LI Dongjie, RONG Weibin, SUN Lining, XIAO Wanzhe, ZOU Yu. SEM-based Tele-nanomanipulation System with Virtual 3D Visualand Force Interaction[J]. ROBOT, 2013, 35(1): 52-59,66. DOI: 10.3724/SP.J.1218.2013.00052
Citation: LI Dongjie, RONG Weibin, SUN Lining, XIAO Wanzhe, ZOU Yu. SEM-based Tele-nanomanipulation System with Virtual 3D Visualand Force Interaction[J]. ROBOT, 2013, 35(1): 52-59,66. DOI: 10.3724/SP.J.1218.2013.00052

基于虚拟3D视觉和力觉交互的SEM遥纳操作系统

SEM-based Tele-nanomanipulation System with Virtual 3D Visualand Force Interaction

  • 摘要: 为增强纳米操作的交互性,本文结合虚拟现实技术,借助力觉反馈设备搭建了基于虚拟3D视觉反馈与虚拟力觉反馈的遥纳操作平台.为确保虚拟环境能够正确反映真实的纳米操作环境,对虚拟模型的碰撞检测和力觉渲染进行了详细设计; 同时在力觉反馈设备和虚拟环境之间引入虚拟匹配环节保证力觉交互接口的稳定,增强主端控制模块的协调性.为实现准确的纳米操作,采用基于兴趣区域的图像特征方法提取探针深度信息,快速建立图像模糊度与探针到基底的距离的关系,实现对探针的闭环控制.最后,利用所述的系统平台以及操作方法,完成了单根ZnO纳米线的转移实验.

     

    Abstract: In order to increase the interaction of nanomanipulation, a tele-nanomanipulation platform with virtual 3D visual feedback and virtual force sense feedback is built by combining with the virtual reality technology and the force feedback device. To ensure that the virtual environment is able to reflect the real nanomanipulation environment accurately, the collision detection and force sensing rendering of the virtual model is designed in detail. The virtual match link between the force feedback device and virtual environment is introduced to ensure the stability of the force interaction interface and to increase the coordination of the master control module. Aiming at the accurate nanomanipulation, the image characteristics extraction method based on the region of interest is adopted to exact the depth information of probe. Then the relationship of image fuzzy degree and the distance between the probe and the substrate is quickly established, and the closed-loop control of the probe is realized. Finally, with the developed platform and the proposed method, the shift experiments of single ZnO nanowire are completed.

     

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