Design and Fabrication of an SU-8 Biomimetic Flapping-wing Micro Air Vehicle by MEMS Technology
CHI Pengcheng1, ZHANG Weiping1, CHEN Wenyuan1, LI Hongyi2, MENG Kun1, CUI Feng1, LIU Wu1, WU Xiaosheng1
1. Key Laboratory for Thin Film and Microfabrication of Ministry of Education, National Key Laboratory of Micro/Nano Fabrication Technology, Research Institute of Nano/Micro Technology, Shanghai Jiao Tong University, Shanghai 200030, China; 2. The State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
Abstract：To develop a light biomimetic flapping-wing micro air vehicle,SU-8 photoresist in micro-electromechanical system(MEMS)field is used as its structural materials.Based on the bionics principle and MEMS technology,the structure and MEMS fabrication process are designed.The results show that this kind of structural design and production solution meet design requirements,and provide a good way for design and fabrication of flapping-wing micro air vehicle.
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