DEVELOPMENT OF A 4-DOF MOBILE PLATFORM WITH NANOMETER RESOLUTION

A 4-dof microrobot with nanometer resolution actuated by piezoelectric elements is described in this paper. The paper particularly discusses the microrobot structure and driving principle,and analyses the dynamic characteristics of the microrobot. Also, a series of moving tests of the robot are carried out under different loads and different material interfaces. It's illuminated by the experiments that the driving principle involved in this system is reasonable.