SYSTEM DESIGN OF MICRO-OPERATION SUB-MILLIMETER OBJECT BASED ON TELEOPERATION
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Graphical Abstract
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Abstract
This paper presents micro-operation system for sub-millimeter micro-object based on teleoperation. The principles and implementation of the vacuum micro-tool, the structure and control of the vacuum system, the motion control of high precise manipulator for micro-operation tasks, and the teleoperation input device, are discussed in detail.
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