Development of an Integrated Strain Gauge for a Micro Six-Axis Force Sensor

In order to fabricate an integrated miniature six-axis force sensor,a novel integrated strain gauge is presented.This strain gauge is made up of six sensitive grids.By attaching the strain gauge on a thin-walled elastic cylinder,a six-axis force sensor is obtained.The signal conditioning circuit and digital circuit are illustrated.Utilizing the small digital signal processor and the rigid-flexible printed circuit board,all circuits are integrated into the sensor body.The static and dynamic calibration of the force sensor is presented,and the results are discussed.