SLIDING MODE VARIABLE STRUCTURE CONTROL OF A MACRO/MICRO DRIVE POSITIONING SYSTEM

In this paper,a sliding mode variable structure control method is proposed for a macro/micro dual-drive positioning system. A linear motor and a PZT actuator is adopted in this system to drive the platform,so large travel and fast response are ensured. A linear encoder is utilized to realize closed-loop displacement feedback. As a result,the system gets a travel range of 100mm and a postioning repeatability of 0.01μm.