CHI Pengcheng, ZHANG Weiping, CHEN Wenyuan, LI Hongyi, MENG Kun, CUI Feng, LIU Wu, WU Xiaosheng. Design and Fabrication of an SU-8 Biomimetic Flapping-wing Micro Air Vehicle by MEMS Technology[J]. ROBOT, 2011, 33(3): 366-370.
Citation: CHI Pengcheng, ZHANG Weiping, CHEN Wenyuan, LI Hongyi, MENG Kun, CUI Feng, LIU Wu, WU Xiaosheng. Design and Fabrication of an SU-8 Biomimetic Flapping-wing Micro Air Vehicle by MEMS Technology[J]. ROBOT, 2011, 33(3): 366-370.
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Design and Fabrication of an SU-8 Biomimetic Flapping-wing Micro Air Vehicle by MEMS Technology

    Abstract
  • To develop a light biomimetic flapping-wing micro air vehicle,SU-8 photoresist in micro-electromechanical system(MEMS)field is used as its structural materials.Based on the bionics principle and MEMS technology,the structure and MEMS fabrication process are designed.The results show that this kind of structural design and production solution meet design requirements,and provide a good way for design and fabrication of flapping-wing micro air vehicle.
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