SEM-based Tele-nanomanipulation System with Virtual 3D Visualand Force Interaction

In order to increase the interaction of nanomanipulation, a tele-nanomanipulation platform with virtual 3D visual feedback and virtual force sense feedback is built by combining with the virtual reality technology and the force feedback device. To ensure that the virtual environment is able to reflect the real nanomanipulation environment accurately, the collision detection and force sensing rendering of the virtual model is designed in detail. The virtual match link between the force feedback device and virtual environment is introduced to ensure the stability of the force interaction interface and to increase the coordination of the master control module. Aiming at the accurate nanomanipulation, the image characteristics extraction method based on the region of interest is adopted to exact the depth information of probe. Then the relationship of image fuzzy degree and the distance between the probe and the substrate is quickly established, and the closed-loop control of the probe is realized. Finally, with the developed platform and the proposed method, the shift experiments of single ZnO nanowire are completed.