Structure Mechanics Characteristics and Experiment of the Micro-motion Stage with Nanometer Resolution

In order to achieve nano-level driving control which is 2-DOF uncoupled,the structure of the nano-level inte-grated micro-motion stage based on oriented slabs and piezoelectric actuators is designed.The structure mechanics charac-teristics of the stage are emphatically studied by analytic calculation.For the stage,the maximum stress of weak section of oriented slab and fundamental frequency of the main-body are obtained.Then the results of analytic calculation are proved by finite element simulation.Finally,the technology of micro-vision is used to test dynamic motion performance of the micro-motion stage.And input-output characteristics curves of the stage are presented.