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| Dynamic Analysis on a Piezoelectric Nanomotor |
| DUAN Zhi-yong, WANG Qing-kang, FEI Ji-cheng |
| Research Institute of Micro/Nano Science and Technology, Shanghai Jiaotong University, Shanghai 200030, China |
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Abstract Based on the converse piezoelectric effect of piezoelectric crystal, a nanometer precision stepper motor is designed and fabricated. The real structure is simplified into a theoretical model, and the dynamic characteristics of the motor are theoretically analyzed. Some parameter criterions of the motor are obtained, and the movement characteristics of the motor are simulated with software.
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Received: 28 December 2003
Published: 15 July 2004
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