Abstract This paper proposed a new type of super precision, high resolution, fast response, destributed and integrated tactile sensor array for intelligent robot. The principle of superprecision test for stress, deformation, temperature, biomass and chemisorb in quartz resonator is described. The sensory method and signal transmission is very specific. And precision, resolution and response time in the system are improved.
Received: 04 August 1995
Published: 15 November 1996