Performance Optimization of a 4-DOF Parallel Positioning Platform

In order to extend the applications of SEMs(Scanning Electron Microscopes) and detect online the physical performance of microstructure,a positioning platform for SEM based on a 4-PUU parallel mechanism is designed.The parallel platform is of simple structure and easy to integrate micro-manipulation mechanisms.In order to optimize the performance of the positioning platform,a spatial dimension model for the 4-PUU mechanism is established.The performance atlases are generated,the effects of the mechanical parameters on such performances as the reachable workspace,dexterity and velocity are analyzed,and some platform mechanical parameters for achieving good performance are obtained.