并联式四自由度定位平台性能优化

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李宁宁, 赵铁石. 并联式四自由度定位平台性能优化[J]. 机器人, 2008, 30(2): 130-137.. LI Ning-ning, ZHAO Tie-shi. Performance Optimization of a 4-DOF Parallel Positioning Platform. ROBOT, 2008, 30(2): 130-137..

摘要为了扩展扫描电镜的用途，实现微结构物性在线检测，本文基于4-PUU并联机构设计了一种扫描电镜定位平台．其结构简单，便于集成微操作装置．为优化平台机构的性能，本文建立了4-PUU机构的空间尺寸模型，绘制了机构性能图谱，分析了机构参数对机构可达工作空间、灵巧性、速度性能的影响，得到了具有良好性能的平台机构参数．

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	李宁宁
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关键词 ：并联机构, 空间尺寸模型, 性能图谱, 优化

Abstract：In order to extend the applications of SEMs(Scanning Electron Microscopes) and detect online the physical performance of microstructure,a positioning platform for SEM based on a 4-PUU parallel mechanism is designed.The parallel platform is of simple structure and easy to integrate micro-manipulation mechanisms.In order to optimize the performance of the positioning platform,a spatial dimension model for the 4-PUU mechanism is established.The performance atlases are generated,the effects of the mechanical parameters on such performances as the reachable workspace,dexterity and velocity are analyzed,and some platform mechanical parameters for achieving good performance are obtained.

Key words： parallel mechanism spatial dimension model performance atlas optimization

收稿日期: 2007-05-17

TP24

基金资助:国家自然科学基金项目（50675191）；国家自然科学基金项目（50375134）

作者简介: 李宁宁（1982- ），男，硕士生．研究领域：微操作机器人．
李宁宁（1982- ），男，硕士生．研究领域：微操作机器人．
赵铁石（1963- ），男，博士，教授，博士生导师．研究领域：并联机器人，仿生机器人，微操作机器人．

链接本文:

https://robot.sia.cn/CN/ 或 https://robot.sia.cn/CN/Y2008/V30/I2/130

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