李炫颖, 李振波, 毛玲, 张大伟, 唐晓宁, 陈佳品. 永磁微型机器人制备及无缆驱动[J]. 机器人, 2013, 35(5): 513-520. DOI: 10.3724/SP.J.1218.2013.00513
引用本文: 李炫颖, 李振波, 毛玲, 张大伟, 唐晓宁, 陈佳品. 永磁微型机器人制备及无缆驱动[J]. 机器人, 2013, 35(5): 513-520. DOI: 10.3724/SP.J.1218.2013.00513
LI Xuanying, LI Zhenbo, MAO Ling, ZHANG Dawei, TANG Xiaoning, CHEN Jiapin. Manufacturing and Wireless Driving of a Permanent Magnetic Micro-robot[J]. ROBOT, 2013, 35(5): 513-520. DOI: 10.3724/SP.J.1218.2013.00513
Citation: LI Xuanying, LI Zhenbo, MAO Ling, ZHANG Dawei, TANG Xiaoning, CHEN Jiapin. Manufacturing and Wireless Driving of a Permanent Magnetic Micro-robot[J]. ROBOT, 2013, 35(5): 513-520. DOI: 10.3724/SP.J.1218.2013.00513

永磁微型机器人制备及无缆驱动

Manufacturing and Wireless Driving of a Permanent Magnetic Micro-robot

  • 摘要: 提出了一种新型钕铁硼永磁微机器人的制备方案及其“振动-黏滑”运动控制算法.介绍了基于MEMS(微机电系统)技术的图形化光刻法制备永磁微机器人的工艺流程.设计了运动控制驱动线圈系统,并确定了系统空间几何中心处2.5cm见方的均匀磁场强度工作区域.介绍了用于线圈驱动的嵌入式系统的 整体设计方案.建立了微机器人的运动模型,然后对“振动-黏滑”运动模式进行了数学仿真,通过实验验证了微机器人的直线2维运动.结果表明,上述无缆驱动微机器人可达10mm/s的平均直线运动速度.

     

    Abstract: This paper presents a new method to fabricate permanent magnetic (NdFeB) micro-robot as well as a motion-control algorithm that leads to "vibration-slip" motion of the micro-robot. MEMS (micro-electro-mechanical system) based graphical photolithography is introduced in robot fabricating process. A customized drive coil system for motion-control is designed. With its uniformly distributed magnetic field, the central cube space inside the coil system with a length of 2.5cm is set for micro-robot motion. The configuration of the whole embedded system for coil system driving is introduced. A dynamic model of the micro-robot is established, and mathematical simulation of its "vibration-slip" motion mode is carried out. Linear 2D motion is demonstrated on the micro-robot in experiment. The result indicates that the magnetic micro-robot's wireless linear motion speed reaches an average of 10 mm/s.

     

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