Abstract: The inverse dynamics equation is established for a class of PSS,6 DOF parallel micro robot with flexible spherical joint by Newton Euler approach, which is the basis for further design and control issue. The presented model not only takes into account the internal motion which the rod rotates about its own axis due to the use of flexible spherical joint but also analyzes the reaction torque generated by the elasticity deformation of flexible spherical joints. The parallel feature inherent in the robot mechanism and modeling makes it possible and quite efficient to compute the dynamics in a parallel computing environment. A simulation study shows the linearity of the driven force of the microrobot, which reveal the linear nature of the microrobot under small motion.